標準號：ISO 17974-2002
中文標準名稱：表面化學分析.高分辨率螺旋電子光譜儀.元素和化學狀態分析用能量標度的校準
英文標準名稱：Surface chemical analysis - High-resolution Auger electron spectrometers - Calibration of energy scales for elemental and chemical-state analysis
標準類型：N51
發布日期：1999/12/31 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：N51
國際標準分類號：71.040.40
適用范圍：This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and for defining the expanded uncertainty of the calibration of the kinetic energy scale with a confidence level of 95 % (this uncertainty includes contributions for behaviours observed in interlaboratory studies but does not cover all possible defects). It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy. Neither it is applicable to those instruments operated at relative resolutions poorer than 0,2 % in the constant △EIE mode or 1,5 eV in the constant △E mode, those requiring tolerance limits of ±0,05 eV or less, nor to those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.