標準號：IEC 62047-3-2006
中文標準名稱：半導體器件.微機電設備.第3部分:拉伸試驗的薄膜標準試驗片
英文標準名稱：Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
標準類型：L94
發布日期：1999/12/31 12:00:00
實施日期：1999/12/31 12:00:00
中國標準分類號：L94
國際標準分類號：31.080.01;31.080.99;31.220.01
適用范圍：This International Standard specifies a standard test piece, which is used to guarantee thepropriety and accuracy of a tensile testing system for thin film materials with length and widthunder 1 mm and thickness under 10 μm, which are main structural materials for microelectromechanicalsystems (MEMS), micromachines and similar devices.This International Standard is based on such a concept that a tensile testing system can beguaranteed in propriety and accuracy, when the measured tensile strengths of the standardtest pieces, whose tensile strength is pre-determined, are within the designated range. It alsospecifies the test pieces to minimize characteristics deviation among the pieces.